|
| |
Cleanroom standards:
|
| All cleanroom areas should be either classified or non-classified.
All classified areas should conform to an applicable standard. This
standard is dependant upon geographic location and usage. Particulate
levels for the two main world standards are listed below. |
ISO 14644-1 cleanroom
standards
|
|
maximum particles/m³ |
| Class |
≥0.1 µm |
≥0.2 µm |
≥0.3 µm |
≥0.5 µm |
≥1 µm |
≥5 µm |
| ISO 1 |
10 |
2 |
|
|
|
|
| ISO 2 |
100 |
24 |
10 |
4 |
|
|
| ISO 3 |
1,000 |
237 |
102 |
35 |
8 |
|
| ISO 4 |
10,000 |
2,370 |
1,020 |
352 |
83 |
|
| ISO 5 |
100,000 |
23,700 |
10,200 |
3,520 |
832 |
29 |
| ISO 6 |
1,000,000 |
237,000 |
102,000 |
35,200 |
8,320 |
293 |
| ISO 7 |
|
|
|
352,000 |
83,200 |
2,930 |
| ISO 8 |
|
|
|
3,520,000 |
832,000 |
29,300 |
| ISO 9 |
|
|
|
35,200,000 |
8,320,000 |
293,000 |
|
US FED STD 209E cleanroom
standards
|
|
maximum particles/ft³ |
| Class |
≥0.1 µm |
≥0.2 µm |
≥0.3 µm |
≥0.5 µm |
≥5 µm |
| 1 |
35 |
7 |
3 |
1 |
|
| 10 |
350 |
75 |
30 |
10 |
|
| 100 |
|
750 |
300 |
100 |
|
| 1,000 |
|
|
|
1,000 |
7 |
| 10,000 |
|
|
|
10,000 |
70 |
| 100,000 |
|
|
|
100,000 |
700 |
NOTE: US FED STD 209E was canceled
November 29,
2001
|
|
And just so that you know.......... here's the ISO list ISO-14644-1
Classification of Air Cleanliness
ISO-14644-2 Testing and Monitoring to prove Compliance
ISO-14644-3 Metrology & Test Methods
ISO-14644-4 Design, Construction and Start-up
ISO-14644-5 Operations
ISO-14644-6 Vocabulary
ISO-14644-7 Separative Devices
ISO-14644-8 Classification of Airborne Molecular Contamination
ISO-14644-9 Clean Surfaces
|
| |
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